Low Temperature Fabrication of Microcrystalline Silicon Thin Films using Microwave Remote-Plasma Enhanced Chemical Vapor Deposition


YOSHIBA S., GOH L. W. , Jeon M., ÜZÜM A. , DHAMRIN M., KAMISAKO K.

24th European Photovoltaic Solar Energy Conference, Hamburg, Germany, 21 - 24 September 2009, pp.2890-2892

  • Publication Type: Conference Paper / Full Text
  • City: Hamburg
  • Country: Germany
  • Page Numbers: pp.2890-2892