Influence of Thermal Treatment Parameters on the Structural and Electrical Behavior of Si-Based MOS Capacitors with ZrO₂ Gate Dielectric
6th International Engineering Research Symposium, Düzce, Turkey, 7 - 09 May 2026, pp.106, (Summary Text)
- Publication Type: Conference Paper / Summary Text
- City: Düzce
- Country: Turkey
- Page Numbers: pp.106
- Karadeniz Technical University Affiliated: Yes