Influence of Thermal Treatment Parameters on the Structural and Electrical Behavior of Si-Based MOS Capacitors with ZrO₂ Gate Dielectric


AKDAĞ A. A., TERZİOĞLU C., KAYA Ş.

6th International Engineering Research Symposium, Düzce, Turkey, 7 - 09 May 2026, pp.106, (Summary Text)

  • Publication Type: Conference Paper / Summary Text
  • City: Düzce
  • Country: Turkey
  • Page Numbers: pp.106
  • Karadeniz Technical University Affiliated: Yes