Influence of Thermal Treatment Parameters on the Structural and Electrical Behavior of Si-Based MOS Capacitors with ZrO₂ Gate Dielectric

AKDAĞ A. A., TERZİOĞLU C., KAYA Ş.

6th International Engineering Research Symposium, Düzce, Turkey, 7 - 09 May 2026, pp.106, (Summary Text)

• Publication Type: Conference Paper / Summary Text
• City: Düzce
• Country: Turkey
• Page Numbers: pp.106
• Karadeniz Technical University Affiliated: Yes