Ohmic Contact Behaviours between Interdigitated Electrode and Nanosized TiO2-Based Thick Film via Flexible Substrate

Bakar A. A., Hamidon M. N., Yaacob M. H., Paiman S., Jaafar H., Jusoh W. N. W., ...More

10th IEEE Electron Devices Technology and Manufacturing Conference: Emerging Semiconductor Devices and Manufacturing Technologies, EDTM 2026, Penang, Malaysia, 1 - 04 March 2026, (Full Text)

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/edtm65772.2026.11497615
  • City: Penang
  • Country: Malaysia
  • Keywords: electrode, flexible, graphite, thick film
  • Karadeniz Technical University Affiliated: Yes

Abstract

This work investigated the ohmic contact behaviours of graphite and silver interdigitated electrodes (IDE) when interfaced via nanosized Titanium (TiO2) based thick films. Six samples were prepared, using kapton film and alumina substrates. The screen printed thick films, composed of TiO2 and Titanium Oxide - Boron Oxide (TiO2-B2O3) in a binder to powder weight ratio of 70:30 wares annealed at 350°C. Characterization using Field Emission Scanning Electron Microscopy (FESEM) was conducted to examine morphological features and elemental composition. The graphite and silver IDE were deposited beneath the TiO2 and TiO2-B2O3 layers on both kapton and alumina substrates, with each sample showing measurable resistance at room temperature. A two-point probe method was used to measure electron movement from the interdigitated electrodes to the layer of TiO2-based thick film. Results indicated that resistance values increase with the addition of glass powder B2O3, indicating that the added B2O3 slows the electron mobility through non-conductive material. Resistance values in TiO2 thick film with silver IDE on alumina and kapton were confirmed to be 0.15Ω and 0.17Ω respectively. Meanwhile, the behaviours of TiO2 and TiO2-B2O3 thick films with graphite IDE on kapton and alumina was 13.78Ω and 23.56Ω respectively. These results indicated that the ohmic contact behaviour showed the capability in electron movement, these criteria are crucial to suggesting their suitability for sensor applications.